December 2014
Used 25 SpeedFam No. 9B-5L/P III,Dbl-Sided,Process Cntrlr.,3-Motor Design,Sony DRO,01                                                                                 UED

Liberty Machinery Company
111 Schelter Rd
Lincolnshire IL 60069-3603
Tel: 847-276-2761 Fax: 847-276-2762
sales@libertymachinery.com  www.libertymachinery.com

25"SpeedFam No. 9B-5L/P III,Dbl-Sided,Process Cntrlr.,3-Motor Design,Sony DRO,01 [36944]

25"SpeedFam No. 9B-5L/P III,Dbl-Sided,Process Cntrlr.,3-Motor Design,Sony DRO,01

Serial No. 9B-5L226547-776 New - 2001

SPECIFICATIONS:
Plate Diameter 24.8"
Plate Diamter I.D. 9.52"
Plate Thickness 1-3/16"
Lower Plate Speed 7 - 60 RPM
Work Carrier Speed 6 - 60 RPM
Total Workload Area 92.7 Square Inches
Upper and Lower Plate Drive Motors 3 HP
Work Carrier Motor 3 HP
Number of Workpiece Carriers 5
Work Carrier Usable Diameter 5.9"
Workpiece Thickness - Minimum 0.005"
- Maximum 0.98"
Height - Head Up 98"
Electrical 208/3/60
Length x Width 66" x 44"
Approximate Weight 3,748 Lbs.

EQUIPPED WITH:
Direct Read System/ Process Controller
Timers for Three Pressure Settings
Sony Model LH51-1 Digital Read-Out

Drive System: The machining plates and work carrier drives are variable speed,
gear reduced, soft starting and electronically controlled.
Rigid Machining Plate Support System
Solid with Slurry Drain Holes Machining Plate
Plumbed for Speedfam Slurry Tank and Pump Distributor with Manual and

Automatic Controls

*Preliminary Specifications are Subject to Verification.




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